Large-aperture polygon-mirror-based scan systems are combined with long-focal-length objectives to enable rapid beam-spot motions ranging between several tens of meters to kilometers per second. Thanks to the excellent beam quality, small spot sizes of several 10 µm can be delivered over large scan fields up to 700 × 700 mm2. For precision microprocessing, laser activity is controlled by fast laser beam switching to precisely synchronize the laser beam with the ultrafast polygon scan system.
